The role of Ohmic heating in dc magnetron sputtering
نویسندگان
چکیده
منابع مشابه
The role of Ohmic heating in dc magnetron sputtering
Sustaining a plasma in a magnetron discharge requires energization of the plasma electrons. In this work, Ohmic heating of electrons outside the cathode sheath is demonstrated to be typically of the same order as sheath energization, and a simple physical explanation is given. We propose a generalized Thornton equation that includes both sheath energization and Ohmic heating of electrons. The s...
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ژورنال
عنوان ژورنال: Plasma Sources Science and Technology
سال: 2016
ISSN: 1361-6595
DOI: 10.1088/0963-0252/25/6/065024